Semiconductor Equipment Manufacturing with Titanium
Titanium components in semiconductor fabrication equipment: UHV compatibility, purity requirements, surface finish specifications, and applications.
Quick Answer
What are titanium’s applications in semiconductor manufacturing? Titanium is used for its corrosion resistance, non-magnetic properties, and UHV compatibility with minimal outgassing.
Applications
- Vacuum chamber walls and components
- Wafer handling end-effectors and grippers
- Showerheads and gas distribution plates
- Electrostatic chuck components